Positive PMMA e-Beam Resist AR-P 630– 670 series
PMMA resist 50K – 950K for the production of semiconductor and masks
▶️ PMMA resist data 產品資料
▶️ resist properties 產品物性
▶️ structure & resolution 結構與解析度
Product quick guide 產品快速導覽▶️ EBL resist 電子束微影阻劑▶️ tSPL resist 熱掃描微影阻劑▶️ Conductive coating 導電塗佈▶️ Photoresist 光阻劑▶️ Protective resist 保護塗層▶️ Bottom resist 底層阻劑▶️ Process chemicals 製程化學品