Positive E-Beam Resist AR-P 6200series (CSAR 62)
High resolution high contrast EBL resists for integrated circuit & masks▶️ Product data 產品資料
▶️ Property I & II 產品物性
▶️ Structure & resolution 結構與解析度
Product quick guide 產品快速導覽▶️ EBL resist 電子束微影阻劑▶️ tSPL resist 熱掃描微影阻劑▶️ Conductive coating 導電塗佈▶️ Photoresist 光阻劑▶️ Protective resist 保護塗層▶️ Bottom resist 底層阻劑▶️ Process chemicals 製程化學品