Medusa 82 silsesquioxane based e-Beam Resist
High-resolution, etch-stable, negative tone, HSQ compatible resist
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▶️ Medusa 82 (SXAR-N 8200) data 產品資料
▶️ Spin curve 塗佈曲線
▶️ Structure & Resolution 結構與解析度
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Medusa 82 silsesquioxane based e-Beam Resist
High-resolution, etch-stable, negative tone, HSQ compatible resist
▶️ Medusa 82 (SXAR-N 8200) data 產品資料
▶️ Spin curve 塗佈曲線
▶️ Structure & Resolution 結構與解析度