Protective Coating AR-PC 5091.02 (Electra 92)
Conductive protective coating for Novolac-based e-beam resists
Top layer for the dissipation of e-beam charges on insulating substrates
Protective Coating AR-PC 5091.02 (Electra 92)
Conductive protective coating for Novolac-based e-beam resists
Top layer for the dissipation of e-beam charges on insulating substrates
AR-PC 5091.02 產品說明
使用於絕緣基板上酚醛系EBL阻劑的導電塗佈,使電子束曝光時電荷得以逸散.
產品編號: AR-PC 5091.02
產品包裝:
100 ml/ /瓶
250 ml/ /瓶
1,000 ml/ /瓶
其它包裝可依客戶需求增加.
出貨: ☑️ 2 - 4 週. 徳國運出
🔲 1 週. 國內庫存
Characterization 產品特性
as protective coating, this resist is not sensitive to light / radiation
此導電保護塗佈材料對光/輻射不感應.
thin, conductive layers for the dissipation of charges during electron exposure
塗佈形成導電薄膜使電子束曝光時,電荷得以逸散
coating of novolac-based e-beam resist AR-N 7000
適用於酚醛係EBL阻劑,例如: AR-N 7000
long term stable
長期穩定性良好
easy removal with water after exposure
曝光後可輕易以水去除
polyaniline-derivative dissolved in water and IPA
主要成分為溶於水及IPA的聚苯胺衍生物
► Conductive coating AR-PC 5090.02 (Electra 92)
▼ Conductive coating AR-PC 5091.02(Electra 92)
▼ features