Protective Coating AR-PC 5091.02 (Electra 92)
Conductive protective coating for Novolac-based e-beam resists
Top layer for the dissipation of e-beam charges on insulating substrates
Embedded Files
REM dissipation charges
50 nm lines written on glass at a pitch of 150 nm with AR-N 7520.07 and AR-PC 5091.02
在玻璃基板上以AR-N 7520.07及AR-PC 5091.02寫出線寬50nm, 線寬線距150um圖案
Process parameter
Substrate 4" wafer quartz with AR-N 7520.07 new
Coating. 60nm@2000 rpm
Soft bake. 50℃
Process chemicals
Adhesion promoter - -
Developer - -
Thinner - -
Remover. DI water
► Conductive coating AR-PC 5090.02 (Electra 92)
▼ Conductive coating AR-PC 5091.02(Electra 92)
▼ dissipation of charges
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