Protective Coating AR-PC 5090.02 (Electra 92)

Conductive protective coating for non-Novolac based e-beam resists

Top layer for the dissipation of e-beam charges on insulating substrates

AR-PC 5090.02 產品說明

使用於絕緣基板上非酚醛系EBL阻劑的導電塗佈,使電子束曝光時電荷得以逸散.

產品編號: AR-PC 5090.02

產品包裝:

   100 ml/ /瓶

   250 ml/ /瓶

1,000 ml/ /瓶

其它包裝可依客戶需求增加.

出貨: ☑️   2 - 4 週. 徳國運出

            🔲         1 週. 國內庫存

Characterization 產品特性

• as protective coating, this resist is not sensitive to light / radiation

此導電保護塗佈材料對光/輻射不感應.

• thin, conductive layers for the dissipation of charges during electron exposure

塗佈形成導電薄膜使電子束曝光時,電荷得以逸散

• coating of non-novolac PMMA, CSAR 62, HSQ et al

適用於非酚醛係EBL阻劑,例如: PMMA, CSAR 62, HSQ等

• long term stable 

長期穩定性良好

• easy removal with water after exposure

曝光後可輕易以水去除

• polyaniline-derivative dissolved in water and IPA

主要成分為溶於水及IPA的聚苯胺衍生物