Protective Coating AR-PC 5090.02 (Electra 92)

Conductive protective coating for non-Novolac based e-beam resists

Top layer for the dissipation of e-beam charges on insulating substrates

Process conditions – conduction coating for PMMA resist

This diagram shows exemplary process steps for resist Electra 92 - AR-PC 5090.02 and PMMA-resist AR-P 664.04. All specifications are guideline values which have to be adapted to own specific conditions.

圖示製程基準值是以AR-PC 5090.02及AR-P 664.04 PMMA EBL resist為範例. 參數為參考值. 使用者應依實際狀況加以調整.