Positive E-Beam Resist AR-P 6200series (CSAR 62)
▶️ Product Brief 產品概述
▶️ Product data 產品資料
▶️ Characterization 產品特性
▶️ Property I & II 產品物性
▶️ Spin curve 塗佈厚度曲綫
▶️ Structure & resolution 結構與解析度
▶️ Process baseline 製程參數
▶️ Plasma etching resistance 耐蝕刻性質
▶️ Process Recipe tuning 參數調整
▶️ Application example 應用實例
✏️ Inquiry of AR-P 6200 請與我聯絡
📂 AR-P 6200 TDS download資料下載
📖 AR-P 6200 bilingual TDS 雙語資料下載