AR-N 7700 series Negative e-Beam Resist (CAR type)
High-resolution resist with steep gradation for semiconductor process
產品簡介:
AR-N 7700系列, 為化學放大 chemically amplified (CAR)負型電子束微影阻劑 (negative tone EBL resist). 可在電子束及深紫外線曝光(deep UV), 對比度高適合於各類半導體製程. 產品系列目前有:
