Protective Coatings AR-PC 500series

adhesion-enhanced KOH-resistant resists for deep trench application

AR-PC 500series 產品說明

AR-PC 500series 系列產品為保護型塗佈,耐氫氧化鉀,適合濕蝕刻製程晶背保護.

產品編號:

AR-PC 503 / AR-PC 504 / AR-PC 5040

產品包裝:  

   250 ml/ /瓶

1,000 ml/ /瓶

出貨: ☑️   2 - 4 週. 徳國運出

            🔲         1 週. 國內庫存

Characterization 產品特性

• not light-sensitive > 300 nm, no yellow light required

對波長> 300nm無反應,無需於黃光區作業

• protection of wafer backside when etching the front side

晶圓蝕刻時做為晶背保護塗佈

• offers reliable protection against mechanical damage during handling and transport.

也可在作業或運輸時提供晶圓保護以避免破壞

• temperature-stable up to 250°C 

高溫達250℃仍可保持穩定

• PMMA with different molecular weights, AR-PC 503 in addition dyed dark

成份含不同分子量的聚甲基丙烯酸甲酯(PMMA),AR-PC 503另添加黑色染料

• solvent 503, 504 chlorobenzene; 5040 anisole

AR-PC 503及AR-PC 504使用氯苯為溶劑. AR-PC 5040溶劑為苯甲醚