Standard Positive Photoresists AR-P 3740 for sub-um

Sensitive photoresist for the production of highly integrated circuits

This diagram shows exemplary process steps for AR-P 3700/3800 resists. All specifications are guideline values which must be adapted to own specific conditions. For further information on processing, 👉“ Detailed instructions for optimum processing of photoresists”. For recommendations on wastewater treatment and general safety instructions, 👉”General product information on Allresist photoresists”.

圖示AR-P 3700/3800系列產品製程參數的範例. 所有參數為參考值,使用者應依設備環境實際狀況加以調整