AR-N 4600 series (Atlas 46) negative photoresist for high film thickness

for the application of electroplating, micro-systems and LIGA < 20 μm

Dyed and fluorescent films with Atlas 46

Different colored, optionally also fluorescent dyes can be embedded into the negative-working Atlas 46 S. These dyes are process-stable, and structuring is performed in the same manner as in standard processes with uncolou- red Atlas 46 S films.

Atlas 46(S)負型光阻可加入不同顏色染料或螢光染料. 製程穩定,與未加染料時的參數一樣. 圖示為5um膜厚加入不同顏色的公司標示.

Varicoloured company logo with Atlas 46 S, film thickness 5 μm

The use of different fluorescent dyes allows a defined adjustable emission in variable wavelength ranges. Fluorescent resist films are e.g., applied in microscopy. By embedding dyes into Atlas 46 S, resist films can be created that optionally show violet, blue, green, yellow, orange or red fluorescence. The intense fluorescence is retained even after a tempering at 150 °C, and the intense UV exposure required for cross-linking of Atlas films exhibits no adverse effect on the emission properties of these layers.

螢光染料可依需求調整不同波長的螢光.俱螢光反應的光阻膜,例如在顯微鏡的應用. 在Atlas 46(S)中加入螢光染料,依需求可顯示紫色,藍色,綠色,黃色,橘色或紅色.螢光的強度及特性不會受到製程中加熱150℃,及紫外光曝光,高分子架橋等因素影響.

Differently fluorescing Atlas 46 films (irradiation with black light)

Also, two-color fluorescent resist architectures could be realized. For this purpose, glass panes were pre-treated with AR 300-80new to optimize the adhesive properties and subsequently coated with different fluorescent Atlas 46 S variants. Exposure was carried out using different masks. After the following PEB, development was carried out with AR 300-12 and films were dried. The developed

structures were then coated with a second, differently colored resist variant with the greatest possible color contrast, e.g., blue – yellow or red – yellow.

No mixing occurred since the already produced structures turned out to be highly stable. The second exposure and PEB step analogous to the first step allowed a selective structuring of the upper layer. After development with AR 300-12, the differently fluorescing areas on the substrate become visible in black light:

雙色螢光製程:玻璃基板先以AR 300-80new以增加黏度, 再塗佈參雜不同螢光染料的Atlas 46(S). 接著以不同光罩進行曝光. 曝後烤後以AR 300-12進行顯影並乾燥. 緊接著進行第二層不同顏色的製程. 顏色選擇儘量以最大對比的組合,例如:藍-黃,或,紅-黃.

兩段製程各自形成穩定的結構,不會有混合的情況. 第二段製程的曝光及曝後烤可再上層形成選擇性結構,以AR 300-12顯影後就可形成不同顏色的發光區域.

AR logo realized with two-colored emission in black light

Also, differently fluorescent lines adjacent to each other (or optionally overlapping) can be created in the same way. 相鄰或重疊的螢光線條也可以此製程製作.