Protective Coating AR-PC 5090.02 (Electra 92)

Conductive protective coating for non-Novolac based e-beam resists

Top layer for the dissipation of e-beam charges on insulating substrates

200 nm-squares written on quartz without distortion caused by charges with AR-P 662.04 and AR-PC 5090.02

在石英基板上以電子束微影寫出不變形的200 nm-squares圖案. 石英基板上的材料是AR-P 662.04 PMMA resist及AR-PC 5090.02導電塗佈.