Protective Coating AR-PC 5090.02 (Electra 92)
Application with different type of resist
30 – 150 nm square of CSAR 62 on Glass
The combination of CSAR 62 with AR-PC 5090.02 offers the best possibilities. complicated e-beam structures on glass, quartz or semi-insulating substrates such as e.g. gallium arsenide. The very good sensitivity and highest resolution of the CSAR are harmoniously complemented by the conductivity of the Electra 92
CSAR 62 電子束微影阻劑搭配AR-PC 5090.02導電塗佈, 增加了奈米製程許多可能性. 例如在玻璃基板, 石英基板,或是GaAs等半絕緣的基板上完成電子束微影的結構.
PMMA-lift-off on Glass with Electra 92
200 nm squares produced with 2-layer PMMA lift-off
在石英基板上做 PMMA lift-off 製程, 程序如下: