SXAR-PC 5000/40 KOH/HF protect coating
SXAR-PC 5000/40 KOH/HF resistant protection coating
產品特性:
SXAR-PC 5000/40 KOH/HF resistant protection coating
features:
- not light-sensitive > 300 nm, no yellow light required
- stable protective film for protecting the wafer backside during etching of the front up to 60 °C, e.g. with 40 % caustic potash, 50 % hydrofluoric acid, BOE
- in two-layer system structurable with AR-P 3250 or AR-N 4400-05/10
- plasma etching resistant
- high-melting modified hydrocarbons - solvent ethylbenzene
- Product series:
- SXAR-PC 5000/40
- Product series: