SXAR-PC 5000/40 KOH/HF protect coating

SXAR-PC 5000/40 KOH/HF resistant protection coating

產品特性:

SXAR-PC 5000/40 KOH/HF resistant protection coating

features:

  • not light-sensitive > 300 nm, no yellow light required
  • stable protective film for protecting the wafer backside during etching of the front up to 60 °C, e.g. with 40 % caustic potash, 50 % hydrofluoric acid, BOE
  • in two-layer system structurable with AR-P 3250 or AR-N 4400-05/10
  • plasma etching resistant
  • high-melting modified hydrocarbons - solvent ethylbenzene
    • Product series:
      • SXAR-PC 5000/40