SXAR-P 3220-7 thick thermal stable
SXAR-P 3220/7 thick thermal stable photoresist - 產品特性:
XAR-P 3220/7 thick thermal stable photoresist - features:
- broadband, i-line, g-line
- high photosensitivity, good resolution
- very plasma etching stable, thermally stable up to 130 °C
- 12 µm with single spin coating step (1000 rpm) possible
- combination of novolac and naphthoquinone diazide
- safer solvent PGMEA