Atlas 46s and 46r thick layer for electroplating

Atlas 46S (SXAR-N 4600-10/3)

Atlas 46R (SXAR-N 4650-10/4)

thick layer photoresist for plating

features:

• thickness range 10um@1000rpm
• dose: 10 um@110-160mJ/cm² (broadband UV)
• Resist 4650-10/4 is in addition easily removable
• short process time
• polymer poly[(o-cresyl glycidyl ether)-co-formaldehyde]
• solvent PGMEA
• acid generator
• Product series:
  • SXAR-N 4600-10/3 (Atlas 46S)
  • SXAR-N 4650-10/4 (Atlas 46R)