5. Protective coatings

Protective Coating

Protective coatings like AR-PC 500 and 5000 are offered by Allresist for a large variety of applications, e.g. for the backside protection of processed wafers during KOH and HF etchings, for a mechanical protection during transport, or as insulating layer. Protective coatings are not lightsensitive and cannot be patterned if used alone. They can however be patterned with photoresists within the

context of a two-layer system.