1. image reversal resists

Image reversal resists

Image reversal resists are the resists of the AR-U 4000 series which are positive resists containing an ad- ditional amine. Depending on the respective manu- facturing process, positive or negative images can be generated. Negative images are produced if an addi- tional tempering step and a flood exposure of the en- tire surface is performed after image-wise exposure.

反轉型光阻, 例如產品AR-U 4000, 是在正型光阻中加入了胺類成份. 在曝光後增加曝後烤及加曝,可使光阻變成負型結構.