AR-U 4000 series image reversal resist
AR-U 4000 series image reversal photoresist
產品特性:
AR-U 4000 series image reversal photoresist
features:
- broadband UV, i-line, g-line, negative exposure up to 450 nm
- high photosensitivity, high resolution
- depending on the processing protocol, positive or negative image with structures in the sub-µm range
- positive working without additional process steps
- high contrast in the negative mode, pronounced undercut profiles are possible (lift-off)
- combination of novolac and bisazide - safer solvent PGMEA
- AR-U 4030
- AR-U 4040
- AR-U 4060