AR-U 4000 series image reversal resist

AR-U 4000 series image reversal photoresist

產品特性:

AR-U 4000 series image reversal photoresist

features:

  • broadband UV, i-line, g-line, negative exposure up to 450 nm
  • high photosensitivity, high resolution
  • depending on the processing protocol, positive or negative image with structures in the sub-µm range
  • positive working without additional process steps
  • high contrast in the negative mode, pronounced undercut profiles are possible (lift-off)
  • combination of novolac and bisazide - safer solvent PGMEA
      • AR-U 4030
      • AR-U 4040
      • AR-U 4060