AR-PC 500 series protection coating

AR-PC 500 (0) series KOH resistant protection coating

產品特性:

AR-PC 500 (0) series KOH resistant protection coating

features:

  • not light-sensitive >300 nm, no yellow light required
  • protection of wafer backside when etching the front side
  • offers reliable protection against mechanical damage during handling and transport
  • temperature-stable up to 250°C
  • PMMA with different molecular weights
  • 503 in addition dyed dark
  • solvent 503, 504 chlorobenzene
  • solvent 5040 PGMEA