AR-PC 500 series protection coating

AR-PC 500 (0) series KOH resistant protection coating

features:

• not light-sensitive >300 nm, no yellow light required
• protection of wafer backside when etching the front side
• offers reliable protection against mechanical damage during handling and transport
• temperature-stable up to 250°C
• PMMA with different molecular weights
• 503 in addition dyed dark
• solvent 503, 504 chlorobenzene
• solvent 5040 PGMEA