AR-P 3500 series std photoresist for IC

AR-P 3500 series standard photoresist for IC fabrication

產品特性:

AR-P 3500 series standard photoresist for IC fabrication

features:

  • broadband UV, i-line, g-line
  • high photosensitivity, high resolution
  • very good adhesion properties
  • 3500 T: robust processing, suitable for TMAH developer 0.26 n
  • plasma etching resistant, temperature-stable up to 120 °C
  • combination of novolac and naphthoquinone diazide
  • safer solvent PGMEA
    • Product series:
      • AR-P 3510
      • AR-P 3510T
      • AR-P 3540
      • AR-P 3540T