AR-P 3200 series thick layer

AR-P 3200 series high film thickness

for electroplating & MEMS

產品特性:

AR-P 3200 series high film thickness

for electroplating & MEMS

features:

  • broadband UV, i-line, g-line
  • high photosensitivity, high resolution
  • profiles with high edge steepness dimension accuracy
  • plasma etch resistant, electroplating-stable
  • 3210/3250 for film thicknesses up to 40 µm/20 µm
  • 3220 transparent for thick films up to 100 µm in multiple coating steps, 100µm development in one step
  • combination of novolac and naphthoquinone diazide
  • safer solvent PGMEA
    • Product series:
      • AR-P 3210
      • AR-P 3220
      • AR-P 3250
      • AR-P 3250T