AR-P 1200 series spray photoresist

AR-P 1200 series spray photoresist

產品特性:

AR-P 1200 series spray photoresist

features:

  • broadband UV, i-line, g-line
  • AR-P 1210 positive resists for a uniform coverage of vertical trenches
  • AR-P 1220 for etch profiles with 54° slopes
  • AR-P 1230 for planar wafers
  • good adhesion, smooth surface
  • combination of novolac and naphthoquinone diazide
  • safer solvent PGMEA as well as methyl ethyl ketone
    • Product series:
      • AR-P 1210
      • AR-P 1220
      • AR-P 1230