AR-N 4300 std mid-UV photoresist

AR-N standard UV range photoresist for IC fabrication

產品特性:

AR-N standard UV range photoresist for IC fabrication

features:

  • i-line, g-line
  • highest sensitivity, excellent resolution
  • good adhesion, high contrast, chemically enhanced
  • undercut profiles (lift-off) are possible
  • plasma etching resistant
  • temperature-stable up to 220 °C after subsequent treatment
  • novolac with photochemical acid generator and amine-based cross-linking agent
  • safer solvent PGMEA
      • AR-N 4340