AR-N 2200 series spray photoresist

AR-N 2200 series spray photoresist

產品特性:

AR-N 2200 series spray photoresist

features:

  • broadband UV, i-line, g-line
  • AR-N 2210 negative resists for a uniform coverage of vertical trenches
  • AR-N 2220 for etch profiles with 54° slopes
  • AR-N 2230 for planar wafers
  • good adhesion, smooth surface
  • combination of novolac and naphthoquinone diazide
  • safer solvent PGMEA as well as methyl ethyl ketone
    • Product series:
      • AR-P 2210
      • AR-P 2220
      • AR-P 2230