features

AR 稀釋劑

產品特性:

• 無色高純度有機溶劑混合液,微粒子過濾
• AR 300-12適用於光阻厚度調整.
• AR 600-01, AR 600-02, AR 600-07, AR 600-09適用於電子束微影阻劑.
• 可用於基板洗邊,或相關設備清洗等用途.
• AR 300-12可去除軟烤<150℃的光阻及未軟烤的電子束微影阻劑.

AR thinner

Features:

• ultra-filtered, colourless, high-purity organic solvent mixtures.
• adjustment of resist film thickness by defined dilution: AR 300-12 for photoresists, AR 600-01, AR 600-02, AR 600-07., AR 600-09 for e-beam resists.
• edge bead removal of coated substrates as well as cleaning of equipment.
• AR 300-12: removal of photoresist films tempered at up to 150 °C and of non-tempered e-beam resist films.