Process Baseline of AR 300-80
AR 300-80 is applied by spin coating between 1000 and 6000 rpm. The film thickness can be adjusted by varying the spin speed to the optimum conditions of the respective process
Higher spin speeds and thus thinner films are preferable, e.g. 4000 rpm with approx. 15 nm thickness. Too high concentrations (film thickness values) may reduce or neutralise the adhesion-promoting effect.
It is recommended to perform the subsequent tempering on a hot plate for 2 min or in a convection oven for 25 min at 180 °C. During tempering, a very uniform, extremely thin layer of adhesion promoter is generated on the substrate (approx. 15 nm).
After cooling of the substrate, the resist can be applied as usual.
An excess of adhesion promoter may be rinsed off with organic solvents like e.g. AR 600-70 or AR 600-71. The optimised surface properties are maintained without restriction.