SXAR-N 7730/1 high gradation
SXAR-N 7730/1 high gradation white light e-beam resist
產品特性:
SXAR-N 7730/1 high gradation white light e-beam resist
features:
- e-beam, deep UV; CAR (no yellow light required)
- high gradation for vertical resist profiles for diffractive optics and holograms
- negative in the UV range 248-265 nm, with high resolution
- plasma etching resistant, thermally stable up to 140 °C
- novolac, acid generator, cross-linker
- safer solvent PGMEA
- Product series:
- SXAR-N 7730/1