SXAR-N 7730/1 high gradation

SXAR-N 7730/1 high gradation white light e-beam resist

features:

• e-beam, deep UV; CAR (no yellow light required)
• high gradation for vertical resist profiles for diffractive optics and holograms
• negative in the UV range 248-265 nm, with high resolution
• plasma etching resistant, thermally stable up to 140 °C
• novolac, acid generator, cross-linker
• safer solvent PGMEA
• Product series:
  • SXAR-N 7730/1