SXAR-N 7730/1 high gradation

SXAR-N 7730/1 high gradation white light e-beam resist

產品特性:

SXAR-N 7730/1 high gradation white light e-beam resist

features:

    • e-beam, deep UV; CAR (no yellow light required)
    • high gradation for vertical resist profiles for diffractive optics and holograms
    • negative in the UV range 248-265 nm, with high resolution
    • plasma etching resistant, thermally stable up to 140 °C
    • novolac, acid generator, cross-linker
    • safer solvent PGMEA
    • Product series:
      • SXAR-N 7730/1