SXAR-N 7700/30 high sensitive resist

SXAR-N 7700/30 high sensitive e-Beam resist, mix & match with broadband UV

產品特性:

SXAR-N 7700/30 high sensitive e-Beam resist mix & match with broadband UV

features:

    • e-beam, BB-UV
    • highest sensitivity, good resolution
    • good adhesion properties, high contrast, chemically enhanced
    • mix & match processes between e-beam and BB- UV are possible
    • plasma etching resistant, very process-stable
    • novolac with photosensitive acid generator and aminic cross-linker
    • safer solvent PGMEA
    • Product series:
      • SXAR-N 7700/30