SXAR-N 7700/30 high sensitive resist
SXAR-N 7700/30 high sensitive e-Beam resist, mix & match with broadband UV
產品特性:
SXAR-N 7700/30 high sensitive e-Beam resist mix & match with broadband UV
features:
- e-beam, BB-UV
- highest sensitivity, good resolution
- good adhesion properties, high contrast, chemically enhanced
- mix & match processes between e-beam and BB- UV are possible
- plasma etching resistant, very process-stable
- novolac with photosensitive acid generator and aminic cross-linker
- safer solvent PGMEA
- Product series:
- SXAR-N 7700/30