features

AR-P 6500 超高膜厚電子束微影

膜厚 >200 um

產品特性:

    • 適合電子束, 同步輻射,及X-射線
    • 不需黃光室
    • 結構品質優良
    • 溶劑形顯影劑
    • 膜厚範圍 10 - 250 um
    • 製程穩定
    • 主要成份為高分子量PMMA及PGMEA安全溶劑
    • 產品系列:
      • AR-P 6510.15
      • AR-P 6510.17
      • AR-P 6510.18
      • AR-P 6510.19

AR-P 6500 series ultra-high film thickness >200um

features:

    • e-beam, synchrotron, X-ray.
    • no yellow light required.
    • excellent image quality.
    • solvent-based developer.
    • film thickness values of 10 to 250 µm
    • process-stable
    • high molecular weight poly(methyl methacrylate) safer solvent PGMEA
    • Product series:
      • AR-P 6510.15
      • AR-P 6510.17
      • AR-P 6510.18
      • AR-P 6510.19