features
AR-P 6500 超高膜厚電子束微影
膜厚 >200 um
產品特性:
- 適合電子束, 同步輻射,及X-射線
- 不需黃光室
- 結構品質優良
- 溶劑形顯影劑
- 膜厚範圍 10 - 250 um
- 製程穩定
- 主要成份為高分子量PMMA及PGMEA安全溶劑
- 產品系列:
- AR-P 6510.15
- AR-P 6510.17
- AR-P 6510.18
- AR-P 6510.19
AR-P 6500 series ultra-high film thickness >200um
features:
- e-beam, synchrotron, X-ray.
- no yellow light required.
- excellent image quality.
- solvent-based developer.
- film thickness values of 10 to 250 µm
- process-stable
- high molecular weight poly(methyl methacrylate) safer solvent PGMEA
- Product series:
- AR-P 6510.15
- AR-P 6510.17
- AR-P 6510.18
- AR-P 6510.19