AR-P 630-670 series PMMA resist
Features
Properties
Spin Curve
Structure & Resolution
Process Baseline
Lift-off Application
recommend on coating
2 layers PMMA structures
compare-50k/200k vs 600/950k
under-cut versus Dose
undercut-application example
Sensitivity & Acceleration Voltage
Reaction Mechanism & Gradation
Specification of PMMA Resist
Application Example of PMMA resists
