i. Comparison vs. ZEP 520A

i. Comparison vs. ZEP 520A

A leading company for electron-beam devices conducted a comparison of CSAR 62 and ZEP 520A. Using the current e-beam system SB 250, three comparative studies of CSAR 62 (AR-P 6200.09) and ZEP 520A were carried out which focused on the parameters structural resolution, contrast and sensitivity in the respective native developers: