06. high precision square structure

h. Application Examples

06. high precision square structure

AR-P 6200 (CSAR 62) – High-precision square struct

A similar objective was pursued by this working group with respect to the fabrication of square structures. The aim was again to obtain corners with particularly high resolution. For this purpose a CSAR 62 film with a thickness of 100 nm was irradiated with 50 kV and developed with developer AR 600-546. In addition to the excellent properties of CSAR 62, also the irradiation design is of vital importance

(👉see Fig. 13, centre: A; right: B).

Fig. 13 Different irradiation designs and resulting square structures

(centre: A; right: B)