05. 2L lift-off structure

h. Application Examples

05. 2 layer lift-off structure

High-precision lift-off structures with the two-layer system

AR-P 6200(CSAR 62)/AR-P 617

The task in the IAP of the Friedrich Schiller University of Jena was to produce very small, high-precision rectangular structures. For this purpose, a two-layer system

composed of AR-P 6200.09 as top layer and AR-P 617.06 as bottom layer was established. After exposure with e-beam writer Vistec SB 350OS, CSAR 62 was patterned with developer AR 600-546. The bottom layer was subsequently developed with developer AR 600-55, followed by coating with gold. The lift-off was performed with a mixture of acetone and isopropanole. The resulting structures are shown in Fig. 12. The structure sizes are 38 nm with structure intervals of approximately 40 nm. In particular to be regarded positively are the small radii of curvature at the corner of the inside of the „L“.

Fig. 12 High-precision L-shaped structures, produced with the

two-layer system AR-P 6200.09 / AR-P 617.06

right photo- 2 Layer systems