01. mask blanks
h. Application Examples
1.0 mask blanks
AR-P 6200 (CSAR 62) on mask blanks
Experts at the HHI Berlin have already tested CSAR 62 on mask blanks (Fig. 1). They immediately achieved a resolution of 50 nm which is an excellent value for masks.
To date, 100 nm lines and above are used on masks. Currently test coatings of mask blanks with CSAR 62 are conducted, and samples will be offered by our partners to all customers in the near future.
Fig. 1 CSAR 62 test structure on a mask blank with 50 nm
lines and 50 nm trenches; pitch line & space here 99.57 nm