AR-N 7720 with flat gradation

AR-N 7720 series e-Beam resist for diffractive optics - 產品特性:

AR-N 7720 series e-Beam resist for diffractive optics - features:

    • e-beam, deep UV; chemically enhanced (CAR)
    • flat gradation for three-dimensional resist profiles for diffractive optics and holograms
    • negative-tone with high resolution in the UV-range 248-265 nm and 290-330 nm
    • plasma etching resistant, temperature-stable up to 140 °C
    • novolac, acid generator, cross-linking agent
    • safer solvent PGMEA
    • Product series:
      • AR-N 7720.13
      • AR-N 7720.30