AR-N 7700 series with steep gradation

AR-N 7700 series e-Beam resist with steep gradation - 產品特性:

AR-N 7700 series e-Beam resist with steep gradation - features:

    • e-beam, deep UV; chemically enhanced (CAR)
    • 7700: high contrast for digital reproduction with excellent sensitivity
    • negative-tone with high resolution in the UV range 248-265 nm and 290-330 nm
    • plasma etching resistant, temp. stable up to 140 °C
    • novolac, acid generator, cross-linking agent
    • safer solvent PGMEA
    • Product series:
      • AR-N 7700.08
      • AR-N 7700.18