AR-N 7700 series with steep gradation
AR-N 7700 series e-Beam resist with steep gradation - 產品特性:
AR-N 7700 series e-Beam resist with steep gradation - features:
- e-beam, deep UV; chemically enhanced (CAR)
- 7700: high contrast for digital reproduction with excellent sensitivity
- negative-tone with high resolution in the UV range 248-265 nm and 290-330 nm
- plasma etching resistant, temp. stable up to 140 °C
- novolac, acid generator, cross-linking agent
- safer solvent PGMEA
- Product series:
- AR-N 7700.08
- AR-N 7700.18