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歡迎光臨

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前瞻製程解決方案

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EBL resist
電子束微影阻劑

AR-P 630-670 series PMMA resist

AR-P 617 series copolymer resist

AR-P 6200 series copolymer resist

AR-P 6510 series thick EBL resist

AR-N 7500 series (non-CAR type)

AR-N 7520_new series (non-CAR type)

AR-N 7520 series (non-CAR type)

AR-N 7700 series (CAR type)

AR-N 7720 series (CAR type)

SX AR-N 8200 series (HSQ-like)

SX AR-N 8250 series (HSQ-line)

tSPL resist
熱掃描微影阻劑

PPA polymer, preparation kit and AR-P 8100

Conductive Coating
導電塗佈

AR-PC 5090.02 (Electra 92)

AR-PC 5091.02 (Electra 92)

AR-PC 5092.02 (Electra 92)

Photoresist
光阻

AR-P 1200 series (positive spray PR)

AR-P 3100 series (adhesion enhanced PR)

AR-P 3200 series (PR for electro-plating)

AR-P 3500 (T) series (std positive PR)

AR-P 3740 (std positive PR)

AR-P 5300 series (positive PR for lift-off)

SX AR-P 3500/8 (high temperature stable PR)

AR-N 2200 series (negative spray PR)

AR-N 4340 (std negative CAR PR for IC)

AR-N 4400 series (thick negative PR)

AR-N 4650-10 (thick PR for plating)

AR-N 4600-10 (thick permanent film)

Protective resist
耐蝕刻塗層

AR-PC 504 (reist for KOH etching)

AR-PC 5040 (reist for KOH etching)

SX AR-PC 5000/41 (resist for KOH & HF etching)

Bottom resist for lift-off
底層阻劑

AR-BR 5400 series (bottom resist)

Lithography process chemicals
微影製程化學品

Stopper
顯影抑制

Thinner
稀釋劑

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